1. Micro EDM

1.1 Tool

 > PCD micro tool (Dia. 26 um) fabricated by WEDG (wire electrical discharge grinding)

 

 

1.2 Hole

1.3 Groove

 

2. Micro ECM

 

3. Micro mechanical machining

 

3.1 Grinding

- Cemented carbide

- Glass (fused silica, Pyrex)

- Ceramics (Alumina, Zirconia)

 

3.2 Shaping