Research
1. Micro EDM
1.1 Tool
> PCD micro tool (Dia. 26 um) fabricated by WEDG (wire electrical discharge grinding)
1.2 Hole
1.3 Groove
2. Micro ECM
3. Micro mechanical machining
3.1 Grinding
- Cemented carbide
- Glass (fused silica, Pyrex)
- Ceramics (Alumina, Zirconia)
3.2 Shaping