Silicon Wafer Microgrinding 정밀 PIEZO 정밀공학회 DISCRIM WC 유리질 탄소 AMT Glassy Carbon AI ZrO2 학술대회 LabVIEW zirconia 2018 2024 Needle 춘계 Journal of Mechanical Science and Technology international journal of advanced manufacturing technology machining 2025 Soda Lime cemented carbide Vitreous Carbon crater Characteristic 실리콘 한국정밀공학회 Bi-LSTM Silicon JKSPE 소다라임유리 electrical discharge machining Ceramic IJAMT EDM Soda-lime elsevier 포스터 Materials & Design KSPE 소다라임 micro grinding Microneedle Lab on a Chip GC 춘계학술대회 PRESM 유리질탄소 Conference discharge crater PRESM2025 VC Soda-lime glass 실리콘 웨이퍼 JMST micro edge Autumn PCD