International Journal 2021.02: Rapid manufacturing of large diameter Cu micropillars by micro-electrical discharge machining and focused ion beam
2021.02:
Ui Seok Lee, Bo Hyun Kim, Sang-Min Kim, Chung-Seog Oh, Rapid manufacturing of large diameter Cu micropillars by micro-electrical discharge machining and focused ion beam, The International Journal of Advanced Manufacturing Technology, Vol 113, Issue 3, pp 1153-1162, 2021
https://doi.org/10.1007/s00170-021-06699-y
ISSN 1433-3015