Cho, Younghak; Hwang, Jihong; Park, Min-Soo; Kim, Bo Hyun
Fabrication Methods for Microscale 3D Structures on Silicon Carbide.
Int. J. Precis. Eng. Manuf. 23, 1477–1502 (2022).
https://doi.org/10.1007/s12541-022-00717-z
Cho, Younghak; Hwang, Jihong; Park, Min-Soo; Kim, Bo Hyun
Fabrication Methods for Microscale 3D Structures on Silicon Carbide.
Int. J. Precis. Eng. Manuf. 23, 1477–1502 (2022).
https://doi.org/10.1007/s12541-022-00717-z