Cho, Y. H., Lee, K. Y., Moon, I. Y., Kim, B. H., Park, K., "Facile Fabrication of Superhydrophobic Poly(Methyl Methacrylate) Substrates using Ultrasonic Imprinting," Journal of Micromechanics and Microengineering, Vol. 23, 055019, 2013
To construct a sharp edge at the tool tip, the discharge energy in μEDM was minimized in the finishing process. The resulting radius of the cutting edge was less than 1 μm